A critical review of the reaction set for a low pressure
oxygen processing discharge
J.T. Gudmundsson
Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik,
Iceland
and
Department of Electrical and Computer Engineering, University of Iceland,
Hjardarhaga 2-6, IS-107 Reykjavik, Iceland
e-mail: tumi@raunvis.hi.is
Abstract
This report contains a collection of reaction rate coefficients for the
reactions in a low pressure oxygen processing discharge.The rate
coefficient are reviewed, evaluated and revised. We assume the
electron energy distribution to be Maxwellian and the fit to the
rate coefficient for electron impact is valid for electron temperature
in the range 1-7 eV.