Jón Tómas Guđmundsson
Raunvísindastofnun Háskólans
Dunhaga 3
IS-107 Reykjavík
e-mail:tumi@raunvis.hi.is
An overview of the current status in electron collision cross sections for the excitation and ionization of molecular and atomic fluorine by electron impact is presented. The available data is used to calculate the rate coefficients for electron impact collision reactions by assuming Maxwellian electron energy distribution. The data presented will be useful in modeling of the plasma chemistry and electrical properties of low-pressure plasma discharges for materials processing.